氮气分压对电弧离子镀CrNx薄膜组织结构的影响
Nitrogen Partial Pressure and Microstructures of CrNx Coating by Arc Ion Plating
查看参考文献13篇
|
文摘
|
利用电弧离子镀技术在钛合金表面制备CrN_x薄膜,分析讨论氮气分压对薄膜表面形貌、相组成和微观结构的影响. 结果表明,随着氮气分压的升高, CrN_x薄膜表面熔滴的数量及尺寸减少,表面平整度得到明显改善;薄膜的物相组成在氮气分压为1.0 Pa时由Cr_2N相变为CrN相;同时因氮气分压改变粒子、离子的轰击作用,影响薄膜表面的能量状态, CrN_x薄膜晶体的择优生长由(200),(220)变为(111). 在氮气分压为1.5 Pa时可获得高沉积效率、高致密度、高硬度,并具有纳米晶体结构的单相CrN薄膜 |
|
其他语种文摘
|
The CrNxcoatings were deposited by arc ion plating onTi-6Al-4V substrates. The impacts of the coating conditions, including the nitrogen partial pressure, deposition rate, duty cycle of the voltage pulse,on mechanical properties of the coating were evaluated. The microstructures of the coating were characterized with scanning electron microscopy,X-ray diffraction, and transmission electronmicroscopy. The results showthatthe nitrogen partial pressure significantly affects the surface morphologies, microstructures and mechanical properties of the CrN_xcoatings. For example,as the partial pressure rises up, the coating becomes increasingly smoothwith decreased number and sizes of Cr droplets. At a 1.0 Pa of nitrogen, the Cr_2N phase transited into CrN. Moreover, the partial pressure influenced the bombardment of charged particles and the electronic properties of the surface. At 1.5 Pa, CrN and a high deposition rate, highly compact, nanocrystal CrN films with high surface hardness can be grown |
|
来源
|
真空科学与技术学报
,2010,30(6):662-666 【扩展库】
|
|
关键词
|
电弧离子镀
;
CrN_x薄膜
;
氮气分压
;
组织结构
|
|
地址
|
1.
江苏大学材料科学与工程学院, 镇江, 212013
2.
中国科学院金属研究所材料表面工程研究部, 沈阳, 110016
|
|
语种
|
中文 |
|
文献类型
|
研究性论文 |
|
ISSN
|
1672-7126 |
|
学科
|
一般工业技术 |
|
基金
|
江苏大学高级技术人才科研启动基金项目
;
江苏大学科技创新团队资助课题
|
|
文献收藏号
|
CSCD:4052569
|
参考文献 共
13
共1页
|
|
1.
唐宾. 离子束增强沉积CrN膜层及其微动摩擦学性能研究.
材料热处理学报,2005,26(3):58-60
|
CSCD被引
7
次
|
|
|
|
|
2.
郭军霞. 类金刚石碳膜的结构及其微动磨损行为.
材料保护,2003,36(9):15-18
|
CSCD被引
5
次
|
|
|
|
|
3.
Jong Hyun Park. Synthesis and Mechanical Properties of Cr Si N Coatings Deposited by a Hybrid System of Arc Ion Plating and Sputtering Techniques.
Surface & Coatings Technology,2004,188/189:425-430
|
CSCD被引
1
次
|
|
|
|
|
4.
赵晚成. CrN活塞环薄膜的摩擦学性能.
润滑与密封,2005(2):59-66
|
CSCD被引
12
次
|
|
|
|
|
5.
Shin S H. Cutting Performance of CrN and Cr-Si-N Coated end-Mill Deposited by Hybrid Coating System for Ultra-High Speed Micro Machining.
Surface & Coatings Technology,2008,202:5613-5616
|
CSCD被引
5
次
|
|
|
|
|
6.
Lee D B. High Temperature Oxidation of a CrNCoating Deposited on a Steel Substrate by Ion Plating.
Surface and Coatings Technology,2001,141:227-231
|
CSCD被引
7
次
|
|
|
|
|
7.
韩增虎. 磁控溅射CrNx薄膜的制备与力学性能.
功能材料,2002,33(5):500-502
|
CSCD被引
7
次
|
|
|
|
|
8.
Myung-Yong Wee. Surface Properties of CrN-Coated Ti 6Al 4V Alloys by Arc-Ion Plating Process.
Materials Letters,2005,59:876-879
|
CSCD被引
1
次
|
|
|
|
|
9.
Boxman R L. Macroparticle Contemination in Cathodic Arc Coatings: Generation, Transport and Control.
Surf Coat Technol,1992,52:39-50
|
CSCD被引
31
次
|
|
|
|
|
10.
Li M S. Effects of Nitrogen Partial Pressure and Pulse Bias Voltage on (Ti, Al)N Coatings by Arc Plating.
Surf Coat Technol,2003,167:197-202
|
CSCD被引
23
次
|
|
|
|
|
11.
钟彬. 氮气含量对CrN_x薄膜相结构及摩擦磨损性能的影响.
材料热处理学报,2007,28(3):134-137
|
CSCD被引
11
次
|
|
|
|
|
12.
史新伟. 磁过滤电弧离子镀TiN薄膜的制备及其强化机理研究.
真空科学与技术学报,2008,28(5):486-491
|
CSCD被引
10
次
|
|
|
|
|
13.
陈康敏. 电弧离子镀NiCoCrAlY涂层的透射电镜研究.
真空科学与技术学报,2009,29(1):21-25
|
CSCD被引
7
次
|
|
|
|
|
了解气象卫星更多信息，请访问