硅基阻挡杂质带太赫兹探测器及其成像研究
Study on the Silicon Based Blocked-Impurity-Band Terahertz Detector and Its Application for Imaging
查看参考文献20篇
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文摘
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太赫兹探测及成像技术是推动太赫兹科学技术发展的基础和关键.为了实现高灵敏太赫兹探测及成像,设计了一种台面型硅基阻挡杂质带太赫兹探测器,详细介绍了其结构及探测机理,描述了其制备工艺流程,并搭建了黑体响应测试系统.结果表明,4.2K温度条件下,3.8V工作偏压时,探测器峰值响应率可达55A/W,响应频段覆盖6.7~60THz.此外,搭建了一套两维扫描成像系统,实现了高分辨率被动成像.实验结果表明,成像系统空间分辨率可达400μm、温度分辨率约为7.5mK. |
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其他语种文摘
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Terahertz detection and imaging technology are the foundation and key to promote terahertz technology development. In order to realize high sensitivity terahertz detection and imaging, a mesa-type silicon-based blocked-impurityband (BIB) terahertz detector is designed. The structure and detection mechanism of the detector are introduced in detail. The preparation processes are presented briefly. A series of its photoelectric performances are investigated. A blackbody responsivity test system is built. The results show that at 4.2K temperature and 3.8V bias, its peak responsivity reaches 55A/ W, and the response spectrum covers the frequency range from 6.7~60THz. In addition, a scan imaging system is set, and the high-resolution passive imaging is achieved. The imaging result shows that the spatial resolution and the temperature resolution of the imaging system can reach about 400μm and 7.5mK, respectively. |
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来源
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电子学报
,2021,49(9):1867-1872 【核心库】
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DOI
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10.12263/DZXB.20190791
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关键词
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阻挡杂质带
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太赫兹探测器
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峰值响应率
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扫描成像
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分辨率
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地址
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中国科学院上海微系统与信息技术研究所, 中国科学院太赫兹固态技术重点实验室, 上海, 200050
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中国科学院大学材料与光电研究中心, 北京, 100049
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中国电子科技集团公司第五十研究所, 上海, 200331
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0372-2112 |
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学科
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物理学 |
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基金
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国家自然科学基金
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国家重点研发计划
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上海市科委项目
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文献收藏号
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CSCD:7077364
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参考文献 共
20
共1页
|
|
1.
Siegel P H. Terahertz technology.
IEEE Transactions on Microwave Theory and Techniques,2002,50(3):910-928
|
CSCD被引
261
次
|
|
|
|
|
2.
陈龙超. 高灵敏度低噪声太赫兹电光探测器研究.
电子学报,2012,40(9):1705-1709
|
CSCD被引
4
次
|
|
|
|
|
3.
廖复疆. 微型真空电子器件和太赫兹辐射源技术进展.
电子学报,2003,31(9):1361-1364
|
CSCD被引
16
次
|
|
|
|
|
4.
Manohara H M. Carbon nanotube Schottky diodes using Ti-Schottky and Pt-Ohmic contacts for high frequency applications.
Nano Letters,2005,5(7):1469-1474
|
CSCD被引
4
次
|
|
|
|
|
5.
姚常飞. 基于肖特基势垒二极管的太赫兹固态倍频源和检测器研制.
电子学报,2013,41(3):438-443
|
CSCD被引
12
次
|
|
|
|
|
6.
Glaab D. Terahertz heterodyne detection with silicon field-effect transistors.
Applied Physics Letters,2010,96(4):042106
|
CSCD被引
6
次
|
|
|
|
|
7.
Tauk R. Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power.
Applied Physics Letters,2006,89(25):253511
|
CSCD被引
15
次
|
|
|
|
|
8.
Nakagawa Y. Characteristics of high-sensitivity Ge bolometer.
Japanese Journal of Applied Physics,1970,9(1):125-131
|
CSCD被引
1
次
|
|
|
|
|
9.
Gu L L. Optical-phonon-mediated photocurrent in terahertz quantum-well photodetectors.
Applied Physics Letters,2015,106(11):111107
|
CSCD被引
7
次
|
|
|
|
|
10.
Sakon I. Conceptual design for the mid-infrared medium-resolution Echelle spectrometer (MIRMES) on the SPICA Mission.
Space Telescopes and Instrumentation 2010: Optical, Infrared, and Millimeter Wave,2010:77310Q-1-77310Q-10
|
CSCD被引
1
次
|
|
|
|
|
11.
Petroff M D.
Blocked impurity band detectors. US Patent:4568960,1986
|
CSCD被引
1
次
|
|
|
|
|
12.
Wang X D. Spectral response characteristics of novel ion-implanted planar GaAs blocked-impurity-band detectors in the terahertz domain.
Optical and Quantum Electronics,2016,48(11):1-10
|
CSCD被引
2
次
|
|
|
|
|
13.
廖开升. 天文用阻挡杂质带红外探测器.
中国科学:物理学力学天文学,2014,44(4):360-367
|
CSCD被引
10
次
|
|
|
|
|
14.
Haegel N M. BIB detector development for the far infrared: From Ge to GaAs.
Quantum Sensing: Evolution and Revolution from Past to Future,2003:182-194
|
CSCD被引
1
次
|
|
|
|
|
15.
Ando K J. Development of Si: As impurity band conduction (IBC) detectors for midinfrared applications.
Infrared Technology and Applications,2003:648-657
|
CSCD被引
1
次
|
|
|
|
|
16.
Reichertz L A. First results on GaAs blocked impurity band (BIB) structures for far-infrared detector arrays.
Infrared Spaceborne Remote Sensing,2005:58830Q-1-58830Q-8
|
CSCD被引
1
次
|
|
|
|
|
17.
Gulkis S. The cosmic background explorer.
Scientific American,1990,262(1):132-139
|
CSCD被引
1
次
|
|
|
|
|
18.
Wolf J. Si: As blocked-impurity-band detectors for ISO′s photometer.
Infrared Spaceborne Remote Sensing Ш,1995:482-488
|
CSCD被引
1
次
|
|
|
|
|
19.
Werner M W. The spitzer space telescope mission.
Advances in Space Research,2005,36(6):1048-1049
|
CSCD被引
2
次
|
|
|
|
|
20.
刘恩科.
半导体物理学. (7版),2016
|
CSCD被引
1
次
|
|
|
|
|
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