基于全场位移测量技术的微悬臂梁面内弯曲性能测试
In-plane Bending Performance Test of Micro-Cantilever Based on Whole-Field Displacement Measuring Technique
查看参考文献27篇
|
文摘
|
基于自制的微力试验机和全场位移光学测量仪,建立了微尺度力学性能原位测试系统。其中微力试验机基于电磁驱动兼载荷计量原理设计,载荷量程和噪音分别为± 1N 和50μN。全场位移光学测量仪基于白光数字散斑相关方法研制。采用该系统对MEMS 单晶硅(001)微悬臂梁进行了面内弯曲力学性能原位测试,获得了微悬臂梁末梢施力点的力- 位移关系曲线,以及全场变形情况。结果显示,微悬臂梁表现出很好的弹性弯曲行为,最后在根部发生脆性断裂。根据弹性弯曲理论计算出单晶硅弹性模量为123. 8GPa(± 3. 2%) 。该技术为研究MEMS 微构件的力学性能提供了一种有效的手段。 |
|
其他语种文摘
|
An in-situ testing system for micro-scale mechanical performance was developed based on a homemade micro-force testing machine and an optical whole-field displacement measuring instrument. The microforce testing machine is designed based on principle of electromagnetic drive and load measurement with load range /noise of ± 1N/50μN,respectively. The optical whole-field displacement measuring instrument was developed based on white light digital speckle correlation method with the specimen’topography acted as the generalized speckle. In-plane bending performance test of MEMS monocrystalline silicon (001 ) microcantilevers was performed by using this testing system. The force-displacement curve at the end of microcantilever was acquired,as well as the whole-field displacement. Results show that the micro-cantilever presents a good elastic bending behavior and finally fractures at the root. Young’s modulus of monocrystalline silicon (001) is determined as 123. 8GPa (± 3. 2%) based on the elastic bending theory. This technique provides a feasible approach for studying the mechanical properties of MEMS micro-structures. |
|
来源
|
实验力学
,2014,29(4):441-446 【核心库】
|
|
关键词
|
微尺度
;
面内载荷
;
数字散斑相关方法
;
微电子机械系统
;
微悬臂梁
|
|
地址
|
1.
中国科学院力学研究所, 非线性力学国家重点实验室, 北京, 100190
2.
中国科学技术大学, 中科院材料力学行为和设计重点实验室, 合肥, 230026
3.
浙江工业大学机械工程学院, 特种装备制造与先进加工技术教育部重点实验室, 杭州, 310014
|
|
语种
|
中文 |
|
文献类型
|
研究性论文 |
|
ISSN
|
1001-4888 |
|
学科
|
力学 |
|
基金
|
国家自然科学基金
;
中国科学院仪器设备功能开发技术创新项目资助
|
|
文献收藏号
|
CSCD:5225637
|
参考文献 共
27
共2页
|
|
1.
Weihs T P. Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films.
J. Mater. Res,1988,3(5):931-942
|
CSCD被引
18
次
|
|
|
|
|
2.
张泰华. 纳米硬度技术的发展和应用.
力学进展,2002,32(3):349-364
|
CSCD被引
80
次
|
|
|
|
|
3.
苏才钧. 微构件材料力学性能测试方法.
实验力学,2005,20(3):441-447
|
CSCD被引
7
次
|
|
|
|
|
4.
Kurt Matoy. A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films.
Thin Solid Films,2009,518:247-256
|
CSCD被引
1
次
|
|
|
|
|
5.
Hsu Changchun. Measuring thin film elastic modulus using a micromachined cantilever bending test by nanoindenter.
Micro/Nanolith. MEMS MOEMS,2007,6(3):033011
|
CSCD被引
1
次
|
|
|
|
|
6.
Huan Yong. Analysis of the practical force accuracy of electromagnet-based nanoindenters.
Measurement,2010,43:1090-1093
|
CSCD被引
2
次
|
|
|
|
|
7.
朱强. 在纳米压入仪上进行悬臂梁法测量弹性模量的影响因素分析.
稀有金属材料与工程,2005,34(11):1842-1845
|
CSCD被引
3
次
|
|
|
|
|
8.
Methporn Mareanukroh. Use of atomic force microscope as a nanoindenter to characterize elastomers.
Rubber Chemistry and Technology,2000,73(5):912-925
|
CSCD被引
2
次
|
|
|
|
|
9.
张向军. MEMS微悬臂梁构件变形规律的AFM试验研究.
机械科学与技术,2005,24(8):966-968
|
CSCD被引
1
次
|
|
|
|
|
10.
Rob Legtenberg. Comb-drive actuators for large displacements.
J. Micromech. Microeng,1996,6:320-329
|
CSCD被引
15
次
|
|
|
|
|
11.
Li J. Tolerance Analysis for comb-drive actuator using DRIE fabrication.
Sensors and Actuators A,2006,125:494-503
|
CSCD被引
3
次
|
|
|
|
|
12.
Sang Won Yoon. Vibration-induced errors in MEMS tuning fork gyroscopes.
Sensors and Actuators A,2012,180:32-44
|
CSCD被引
4
次
|
|
|
|
|
13.
郇勇. 微力学测试仪在MEMS键合强度测试中的应用.
机械强度,2005,27(3):331-334
|
CSCD被引
2
次
|
|
|
|
|
14.
Toshiyuki Tsuchiya. Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 film s.
Sensor s and Actuators,2000,82(1/3):286-290
|
CSCD被引
6
次
|
|
|
|
|
15.
陈大庆. 斜光轴面内位移测量的数字散斑相关法研究.
光学学报,2005,25(7):907-912
|
CSCD被引
7
次
|
|
|
|
|
16.
何小元. 微电子与微电子机械系统（MEMS）中的现代光学测试技术.
机械强度,2001,23(4):447-451
|
CSCD被引
6
次
|
|
|
|
|
17.
Chang S. Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing.
Nanotechnology,2005,16:344-349
|
CSCD被引
5
次
|
|
|
|
|
18.
Li X. Experimental investigation o f polycrystalline material deformation based on a grain scale.
Chinese Physics Letter,2005,22:2553-2556
|
CSCD被引
3
次
|
|
|
|
|
19.
Pan B. Measurement of co efficient of thermal expansion of films using digital image correlation method.
Polymer Testing,2009,28:75-83
|
CSCD被引
16
次
|
|
|
|
|
20.
Leslie Banks-Sills. Measurement of Poisson's ratio by means of a direct tension test on micron-sized specimens.
Sensors and Actuators A,2011,169:98-114
|
CSCD被引
1
次
|
|
|
|
|
了解气象卫星更多信息，请访问