偏振和位相调控分光膜的设计与制备
Design and fabrication of polarization and phase modulated beam splitter
查看参考文献13篇
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文摘
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偏振和位相调控分光膜是自由空间量子通信系统中不可缺少的光学元件,其性能直接影响通信质量,决定通信误码率。基于等效层设计理论,采用"介质+金属+介质"的特殊膜系结构,选用Ag金属和SiO_2、Al_2O_3、Ta_2O_5三种介质膜料作为镀膜材料,实现石英衬底45°入射时, 1 500~1 600 nm波段消偏振平均透射/反射比为8.5:91.5,在1 530、1 540、1 550、1 560 nm控制位相的分光膜。采用电子束蒸发离子辅助沉积技术,优化沉积工艺,制备了分光膜样品。检测结果表明:在45°入射条件下,1 500~ 1 600 nm波段光谱平均透射/反射比为8.53:91.47,在1 530、1 540、1 550、1 560 nm处透射光位相差控制在5.02°以内,反射光位相差控制在8.05°以内,满足通信系统分光比及位相控制的要求。此外,该分光膜通过了相应的环境试验测试,满足可靠性要求。 |
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其他语种文摘
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Polarization and phase controlled beam splitter is an indispensable optical element in free space quantum communication system. Its performance directly affects the communication quality and determines the communication error rate. Based on the theory of equivalent layer design, the special film structure of ''dielectric+metal+dielectric'' is adopted, and Ag metal material and SiO_2, Al_2O_3, Ta_2O_5 dielectric material are selected to realize 45° incident angle on quartz substrate, and the average transmittance/reflectance ratio is 8.5:91.5 in the wavelength range from 1 500 nm to 1 600 nm. Phase is controlled at 1 530, 1 540, 1 550, 1 560 nm. By optimizing the deposition process, the splitter film samples are prepared by electron beam evaporation with ion assisted technology. The test results show that the average transmittance/reflectance ratio is 8.53:91.47 in the wavelength range of 1 500-1 600 nm under the condition of 45° incidence. The transmitted phase difference controlled within 5.02° and the reflected phase controlled with 8.05° in the range of 1 530, 1 540, 1 550, 1 560 nm, which meets the requirements of spectral energy splitting ratio and phase control of communication system. In addition, the film passed the corresponding environmental test, which meets the reliability requirements. |
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来源
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红外与激光工程
,2022,51(5):20210512 【核心库】
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DOI
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10.3788/IRLA20210512
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关键词
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光学薄膜
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分光膜
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消偏振
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位相
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等效层
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地址
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长春理工大学中山研究院, 广东, 中山, 528437
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中国科学院西安光学精密机械研究所, 陕西, 西安, 710119
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1007-2276 |
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学科
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物理学 |
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基金
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中国科学院自研项目
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文献收藏号
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CSCD:7242402
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