大气压等离子体射流装置及应用研究进展
Advance in Atmospheric Pressure Plasma Jet and Its Applications
查看参考文献87篇
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文摘
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大气压等离子体射流( APPJ)能够在开放空间而不是在狭窄放电间隙中产生高活性非平衡低温等离子体,APPJ已经成为国际上等离子体科学与技术领域的研究热点之一.本文首先介绍了4种典型的等离子体射流装置,包括单针、针-环、单双环以及微腔结构,并分析了各自的结构特点.然后介绍了APPJ近几年的研究进展,包括射流装置结构、活性粒子探测方法、射流与外界物质相互作用及应用等方面.最后对APPJ面临的一些关键问题和发展方向进行了展望. |
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其他语种文摘
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The latest progress in atmospheric pressure plasma jet ( APPJ) and its applications were tentatively reviewed. The discussions centered on: i ) the advantages over the conventional dielectric barrier discharge ( DBD) , such as the generation of highly active,non-equilibrium, low-temperature plasma in open space, instead of in a narrow discharge gap; ii) the structures and properties of the four typical APPJs, including the single-needle, needle-ring, single /double-ring and micro-cavity; and iii) the hot-spot research subjects, including but not limited to the structure optimization,diagnosis of highly active particles, interaction of the plasma with different materials, and applications. In addition, the major technical problems and possible solutions and development trends of APPJ were briefly discussed in a thought provoking way. |
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来源
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真空科学与技术学报
,2018,38(8):695-707 【扩展库】
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DOI
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10.13922/j.cnki.cjovst.2018.08.09
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关键词
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大气压等离子体
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等离子体射流
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介质阻挡放电
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电极结构
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纳米薄膜沉积
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地址
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1.
合肥工业大学,机械工程学院真空与过程装备系, 合肥, 230009
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中国科学院等离子体物理研究所, 合肥, 230031
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中国科学技术大学中国科学技术大学近代物理系, 合肥, 230026
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语种
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中文 |
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文献类型
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综述型 |
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ISSN
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1672-7126 |
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学科
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物理学;电子技术、通信技术 |
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基金
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国家自然科学基金项目
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安徽省自然科学基金
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合肥工业大学大学生创新项目资助
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文献收藏号
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CSCD:6310106
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