基于全场位移测量技术的微悬臂梁面内弯曲性能测试
In-plane Bending Performance Test of Micro-Cantilever Based on Whole-Field Displacement Measuring Technique
查看参考文献27篇
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文摘
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基于自制的微力试验机和全场位移光学测量仪,建立了微尺度力学性能原位测试系统。其中微力试验机基于电磁驱动兼载荷计量原理设计,载荷量程和噪音分别为± 1N 和50μN。全场位移光学测量仪基于白光数字散斑相关方法研制。采用该系统对MEMS 单晶硅(001)微悬臂梁进行了面内弯曲力学性能原位测试,获得了微悬臂梁末梢施力点的力- 位移关系曲线,以及全场变形情况。结果显示,微悬臂梁表现出很好的弹性弯曲行为,最后在根部发生脆性断裂。根据弹性弯曲理论计算出单晶硅弹性模量为123. 8GPa(± 3. 2%) 。该技术为研究MEMS 微构件的力学性能提供了一种有效的手段。 |
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其他语种文摘
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An in-situ testing system for micro-scale mechanical performance was developed based on a homemade micro-force testing machine and an optical whole-field displacement measuring instrument. The microforce testing machine is designed based on principle of electromagnetic drive and load measurement with load range /noise of ± 1N/50μN,respectively. The optical whole-field displacement measuring instrument was developed based on white light digital speckle correlation method with the specimen’topography acted as the generalized speckle. In-plane bending performance test of MEMS monocrystalline silicon (001 ) microcantilevers was performed by using this testing system. The force-displacement curve at the end of microcantilever was acquired,as well as the whole-field displacement. Results show that the micro-cantilever presents a good elastic bending behavior and finally fractures at the root. Young’s modulus of monocrystalline silicon (001) is determined as 123. 8GPa (± 3. 2%) based on the elastic bending theory. This technique provides a feasible approach for studying the mechanical properties of MEMS micro-structures. |
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来源
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实验力学
,2014,29(4):441-446 【核心库】
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关键词
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微尺度
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面内载荷
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数字散斑相关方法
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微电子机械系统
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微悬臂梁
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地址
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1.
中国科学院力学研究所, 非线性力学国家重点实验室, 北京, 100190
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中国科学技术大学, 中科院材料力学行为和设计重点实验室, 合肥, 230026
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浙江工业大学机械工程学院, 特种装备制造与先进加工技术教育部重点实验室, 杭州, 310014
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1001-4888 |
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学科
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力学 |
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基金
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国家自然科学基金
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中国科学院仪器设备功能开发技术创新项目资助
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文献收藏号
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CSCD:5225637
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