微纳系统材料、制造与器件物理研究进展
Material,Fabrication and Device Physics on Micro-Nano Systems
查看参考文献55篇
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文摘
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本文基于“微纳系统材料、制造与器件物理”国家自然科学基金创新研究群体的研究成果,系统综述了纳米材料与纳米效应、纳米传感器件物理与器件设计、基于MEMS的纳米制造技术以及高性能微纳传感器、红外及THz波段探测等方面的研究进展,并简要介绍了本创新研究群体研制出的超微量快速检测微纳传感器及其应用。 |
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其他语种文摘
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In recent years, aiming at the detection on trace level of high explosives (e. g. TNT),chemical toxins (e. g. sarin),narcotics, and environmental gases with fast response, the innovative research groups have focused on the topics of nano materials and nano effects, physics and design of the sensors, nano fabrication based on MEMS technology, and high performance sensors, produced the micro-nano fused sensors with ultra sensitivity and good reliability, and applied them in important affairs. |
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来源
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中国科学基金
,2014,28(2):81-91 【核心库】
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关键词
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纳米材料
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纳米效应
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微纳制造
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微纳传感器
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地址
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中国科学院上海微系统与信息技术研究所, 上海, 200050
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语种
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中文 |
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文献类型
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综述型 |
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ISSN
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1000-8217 |
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基金
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国家自然科学基金创新研究群体项目
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国家自然科学基金创新研究群体项目
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国家自然科学基金创新研究群体项目
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文献收藏号
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CSCD:5113783
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参考文献 共
55
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