基于规则球型纳米颗粒的探针建模与图像重构
Regular spherical nano-particle based tip estimation and image reconstruction
查看参考文献16篇
|
文摘
|
考虑到在原子力显微镜扫描成像过程中，由于探针针尖形貌和样品表面的卷积作用，使得样品形貌在扫描图像中的形状“展宽”，严重影响了原子力成像的质量，进行了重构探针形貌，然后使用反卷积的方法降低扫描图像中探针展宽效应的研究。分析了目前常用的探针建模方法——盲建模算法，该方法不需要已知表面形貌的样品薄膜（如多孔铝薄膜）来标定探针形貌，但会使降噪参数对探针建模结果产生很大影响，并且标定薄膜的表面也容易被污染，这样就降低了该方法的使用效率。针对这些问題，提出基于数学形态学的建模方法，即通过在平整的表面上沉积规则球型纳米颗粒对探针模型建模，然后重构扫描图像。通过仿真与实验结果验证了该方法的有效性。 |
|
其他语种文摘
|
Considering that during the scanning image of an atom force microscopy (AFM)，the AFM tip shape convolves with the surface morphology，and the feature in the surface is broaden in the image，thus the tip broaden effect will lead to distortion of the image，a study on reconstructing the tip shape to decrease the image distortion by using de-convolution operation was conducted. The blind tip estimation，a method which is often used to evaluate the tip shape currently,was analyzed. The analysis indicated that though this blind tip estimation method does not require the calibration film whose surface morphology is pre-known, such as porous aluminum, but it makes the noise threshold influence on the tip estimation result greatly, and the surface of the calibration film is easily contaminateci, These disadvantages could reduce the efficiency of the method. As for these problems, the mathematic morphology based method was proposed to estimate the tip shape through imaging the regular spherical nano-particle on the flat CD surface, then achieve the image reconstruction. The simulation and experimental results show the effectiveness of the proposed method. |
|
来源
|
高技术通讯
,2013,23(9):946-950 【扩展库】
|
|
关键词
|
原子力显微镜(AFM)
;
数学形态学
;
探针建模
;
纳米操作
|
|
地址
|
1.
沈阳建筑大学, 国家机器入学重点实验室, 沈阳, 110168
2.
沈阳建筑大学, 沈阳, 110168
3.
中国科学院沈阳自动化研究所, 国家机器入学重点实验室, 沈阳, 110016
|
|
语种
|
中文 |
|
文献类型
|
研究性论文 |
|
ISSN
|
1002-0470 |
|
学科
|
机械、仪表工业;化学工业 |
|
基金
|
国家自然科学基金
;
中国博士后科学基金
;
沈阳建筑大学青年基金
|
|
文献收藏号
|
CSCD:4959398
|
参考文献 共
16
共1页
|
|
1.
Binning G.
Atomic force microscopy Phys Rev Lett,1986,56(9):930-933
|
被引
463
次
|
|
|
|
|
2.
Muller D J. Atomic force microscopy as a multifunctional molecular toolbox in nanobiotechnology.
Nat Nano,2008,3(5):261-269
|
被引
29
次
|
|
|
|
|
3.
袁明秀. AFM观察小鼠心肌核DNA转录调控和蛋白质相互作用.
高技术通讯,2003,13(4):34-38
|
被引
2
次
|
|
|
|
|
4.
唐雨钊.
生物分子纳米图样构建及其纳米复型研究：[博士学位论文],2009:16-22
|
被引
1
次
|
|
|
|
|
5.
Hans L. Semiconductor nanostructures: a new impact on electronics.
Applied Surface Science,1998,130/132:855-865
|
被引
1
次
|
|
|
|
|
6.
Dixson R G. Measurement of pitch and width samples with the NIST calibrated atomic force microscope.
Proceedings of Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope,1998:420-432
|
被引
1
次
|
|
|
|
|
7.
Nelson-Thomas C M. Metrology methods for the quantification of edge roughness.
Proceedings of Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope,1998:19-29
|
被引
1
次
|
|
|
|
|
8.
王春梅.
基于AFM的纳米结构精确测量的方法学和标准化研究：[博士学位论文],2009:9-11
|
被引
1
次
|
|
|
|
|
9.
Villarnibia J S. Morphological estimation of tip geometry for scanned probe microscopy.
Surf Sci,1994,321(3):287-300
|
被引
10
次
|
|
|
|
|
10.
Yuan S. Research on the reconstruction of fast and accurate AFM probe model.
Chinese Science Bulletin,2010,55(24):2750-2754
|
被引
2
次
|
|
|
|
|
11.
Villarrubia J S. Algorithms for scanned probe microscope image simulation surface reconstruction and tip estimation.
Journal of Research of the National Institute of Standards and Technology,1997,102(4):425-454
|
被引
15
次
|
|
|
|
|
12.
Dongmo L S. Experimental test of blind tip reconstruction for scanning probe microscopy.
Ultramicroscopy,2000,85(3):141-153
|
被引
8
次
|
|
|
|
|
13.
Keller D. Reconstruction of STM and AFM images distorted by finite-size tips.
Surface Science,1991,253(1-3):353-364
|
被引
9
次
|
|
|
|
|
14.
Tranchida D. Some experimental issues of AFM tip blind estimation:the effect of noise and resolution.
Meas Sci Technol,2006,17(10):2630-2636
|
被引
10
次
|
|
|
|
|
15.
Sui Y. Characterization of anodic porous alumina by AFM.
Materials Letters,2001,48(3-4):127-136
|
被引
4
次
|
|
|
|
|
16.
崔屹.
图像处理与分析一数学形态学的方法及应用,2000:15-24
|
被引
1
次
|
|
|
|
|
了解气象卫星更多信息，请访问