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Frictional and Optical Properties of Diamond-Like-Carbon Coatings on Polycarbonate

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Lin Zeng 1   Wang Feng 2   Gao Ding 1   Ba Dechun 1   Liu Chunming 3  
文摘 In this work, diamond-like-carbon (DLC) fllms were deposited onto polycarbonate (PC) substrates by radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD), and silicon fllms were prepared between DLC and PC substrates by magnetron sputtering deposition so as to improve the adhesion of the DLC fllms. The deposited fllms were investigated by means of fleld-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Subsequently, the following frictional and optical properties of the fllms were measured: the friction coefficient by using a ball-on-disk tribometer, the scratch hardness by using a nano-indenter, the optical transmittance by using a UV/visible spectrometer. The effects of incident power upon the frictional and optical properties of the fllms were investigated. Films deposited at low incident powers showed large optical gaps, which decreased with increasing incident power. The optical properties of DLC fllms correlated to the sp~2 content of the coatings. High anti-scratch properties were obtained at higher values of incident power. The anti-scratch properties of DLC fllms correlated to the sp~3 content of the coatings.
来源 Plasma Science & Technology ,2013,15(7):690-695 【核心库】
DOI 10.1088/1009-0630/15/7/16
关键词 diamond-like-carbon fllms ; PECVD ; microstructure ; frictional and optical properties
地址

1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang, 110004  

2. Shenyang Aeroengine Research Institute, Shenyang, 110015  

3. School of Materials & Metallurgy, Northeastern University, Shenyang, 110004

语种 英文
文献类型 研究性论文
ISSN 1009-0630
学科 原子能技术
基金 supported by China Postdoctoral Science Foundation Funded Project ;  Liaoning Province of China ;  Shenyang City of China ;  supported by the Fundamental Research Funds for the Central Universities, China
文献收藏号 CSCD:4881976

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