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采用低温缓冲层技术在Si衬底上生长高质量Ge薄膜
Growth of high quality Ge epitaxial films on Si substrate by low temperature buffer technique

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周志文 1   贺敬凯 1   李成 2   余金中 3  
文摘 采用低温缓冲层技术,在Si衬底上生长了质量优良的Ge薄膜。利用原子力显微镜(AFM)、双晶X射线衍射(XRD)和拉曼散射等研究了薄膜的晶体质量。结果表明,由于无法抑制三维岛状生长,低温Ge缓冲层的表面是起伏的。然而,Ge与Si间的压应变几乎完全弛豫。当缓冲层足够厚时,后续高温Ge外延层的生长能够使粗糙的表面变得平整。在90 nm低温Ge缓冲层上生长的210 nm高温Ge外延层,表面粗糙度仅为1.2 nm,位错密度小于5×105cm-2,XRD的峰形对称,峰值半高宽为460 arc sec。
其他语种文摘 High-quality and thick Ge epitaxial films are grown on Si substrates utilizing the low-temperature(LT)buffer technique by ultrahigh vacuum chemical vapor deposition(UHV-CVD)and are characterized by atomic force microscope,X-ray diffraction,and Raman spectroscopy.The results show that the LT Ge buffer is rough due to the three-dimensional islands formations,but the misfit stress is nearly fully relaxed.Fortunately,the rough LT Ge surface is effectively smoothed by subsequent growth at elevated temperature when the LT Ge buffer is thick enough and the compressive strain is largely relaxed.Finally,the 210 nm Ge epitaxial film with smooth surface(root-mean-square roughness of 1.2 nm),low threading dislocation density(5×105 cm-2),and sharp and symmetric X-ray diffraction peak(full width at half maximum of ~460 arc sec)is achieved on LT Ge buffer with thickness of 90 nm.
来源 光电子·激光 ,2011,22(7):1030-1033 【核心库】
关键词 Ge薄膜 ; 低温缓冲层技术 ; 表面形貌 ; 超高真空化学气相沉积(UHV-CVD)
地址

1. 深圳信息职业技术学院电子通信技术系, 广东, 深圳, 518029  

2. 厦门大学物理系, 福建, 厦门, 361005  

3. 中国科学院半导体研究所, 集成光电子学国家重点实验室, 北京, 100083

语种 中文
文献类型 研究性论文
ISSN 1005-0086
学科 电子技术、通信技术
基金 国家973计划
文献收藏号 CSCD:4256847

参考文献 共 21 共2页

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引证文献 7

1 陈城钊 Si基Ge/SiGeⅠ型量子阱结构的理论设计和实验研究 光电子·激光,2012,23(5):922-927
被引 1

2 周志文 Si基外延Ge薄膜中残余应变的检测与分析 光电子·激光,2012,23(9):1749-1753
被引 1

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