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基于SOI结构的1×8阵列上下载微环滤波器
Eight-channel add-drop microring filters on SOI wafer

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文摘 利用193 nm深紫外曝光的方法应用CMOS技术,在SOI片上加工制作了1×8阵列上下载微环滤波器,微环半径分别为21.0,20.5,20.0和19.5μm.通过测量直通端的透射光谱,在1 540~1 560 nm的波段上观测到微环阵列谐振波长的透射谱凹陷,对应的消光比均大于15dB,在谐振波长1559.5 nm处的消光比高达35 dB.在半径为20.5μm的微环下载端,测得的波长为1 542.6,1 546.7,1 551.0,1 555.2和1 559.3 nm的下载峰,对应的自由谱宽为4.2 nm
其他语种文摘 Eight-channel add-drop microring filters are designed and fabricated by CMOS foundry technique on SOI wafer with 193 nm DUV lithography,where the microring radius are 21,20.5,20,and 19.5 μm,respectively. By measuring the transmission spectra of the through port,the transmission valleys corresponding to the resonant wavelengths of microring array are observed with the extinction ratio larger than 15 dB from 1 540 nm to 1 560 nm. The largest extinction ratio is 35 dB at the resonant wavelength of 1 559.5 nm. From the transmission spectra of the drop port corresponding to microring with the radius of 20.5 μm,the drop peaks are observed at the resonant wavelength of 1 542.6,1 546.7,1 551,1 555.2,and 1 559.3 nm,respectively with the free spectral region about 4.2 nm
来源 光电子·激光 ,2010,21(8):1125-1128 【核心库】
关键词 SOI ; 1×8阵列上下载微环滤波器 ; 消光比 ; 自由谱宽
地址

中国科学院半导体研究所, 集成光电子学国家重点联合实验室, 北京, 100083

语种 中文
文献类型 研究性论文
ISSN 1005-0086
学科 一般工业技术
基金 国家自然科学基金资助项目 ;  国家973计划
文献收藏号 CSCD:4026375

参考文献 共 13 共1页

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引证文献 4

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被引 6

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