|
非掺半绝缘InP材料的电子辐照缺陷研究
Study of electron irradiation-induced defects in undoped semi-insulating InP
查看参考文献10篇
文摘
|
本文针对磷化铁(FeP_2)气氛下高温退火非掺杂半绝缘磷化铟(IP SI-InP)材料,应用正电子寿命谱及热激电流谱学技术,研究了该材料在电子辐照前后的缺陷情况.研究发现,该材料经电子辐照后缺陷浓度在增大,且形成了复合体的缺陷结构,电子辐照后的正电子湮没平均寿命增加了18 ps,对应的热激电流谱(TSC)也出现了相应的缺陷峰.本文还对缺陷的特性、影响材料的性能等进行了简要的论述 |
其他语种文摘
|
The positron annihilation lifetime spectroscopy (PAL) and thermally stimulated current spectroscopy (TSC) have been employed to study defects before and after electron irradiation in InP which has undergone a high-temperature annealing in iron phosphide ambience. It is found that the concentration of defects in SI-InP after electron irradiation increases and the complex defects are formed as well. The positron mean lifetime τ_m increases about 18ps and more defect peaks are also found in the TSC after irradiation. The characterization of defects and the influence of defects on material property are discussed simply in this paper |
来源
|
四川大学学报. 自然科学版
,2010,47(5):1069-1072 【核心库】
|
关键词
|
磷化铟
;
正电子寿命谱
;
电子辐照
;
缺陷
|
地址
|
1.
四川大学物理科学与技术学院物理系, 成都, 610065
2.
中国科学院半导体研究所, 北京, 100083
|
语种
|
中文 |
文献类型
|
研究性论文 |
ISSN
|
0490-6756 |
学科
|
物理学 |
基金
|
国家自然科学基金
|
文献收藏号
|
CSCD:3983354
|
参考文献 共
10
共1页
|
1.
Zhao Y W. Electron irradiation-induced defects in InP pre-annealed at high temperature.
Materials Science in Semiconductor Processing,2006,9:380
|
被引
1
次
|
|
|
|
2.
Zhao Y W. Formation of P_(In) defect in annealed liquid-encapsulated Czochralski InP.
Appl Phys Lett,1998,72:1727
|
被引
3
次
|
|
|
|
3.
Beling C D. Positronlifetime study of compensation defects in undoped semi-insulating InP.
Phys Rev B,1998,58(20):13648
|
被引
5
次
|
|
|
|
4.
张英杰. 正电子深能级瞬态谱在 GaAs缺陷研究中的应用.
四川大学学报:自然科学版,2008,45(3):86
|
被引
1
次
|
|
|
|
5.
Kuriyamaa K. Thermally stimulated current study~… by multiple-step wafer annealing.
Solid State Commun,2003,126:309
|
被引
1
次
|
|
|
|
6.
Deng A H. Effects of annealing ambient on the formation of compensation defects in InP.
J Appl Phys,2003,93(2):930
|
被引
7
次
|
|
|
|
7.
Shan Y Y. Positron-annihilation study of compensation defects in InP.
J Appl Phys,2002,91(4):1998
|
被引
1
次
|
|
|
|
8.
王少阶.
应用正电子谱学,2008
|
被引
12
次
|
|
|
|
9.
王博. 高温退火后非掺杂磷化铟材料的电子辐照缺陷.
物理学报,2007,56(3):1603
|
被引
2
次
|
|
|
|
10.
Zhao Y W. Origin of deep level defect related photoluminescence in annealed InP.
J Appl Phys,2006,100:123519
|
被引
2
次
|
|
|
|
|
|