(Ti, Al)N/Ti_2AIN涂层的制备
PREPARATION OF (Ti, AI)N/Ti_2AIN COATINGS
查看参考文献19篇
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文摘
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利用电弧离子镀技术在不锈钢基体上沉积了Ti-AI-N涂层, 研究了沉积工艺参数对沉积态涂层的成分及相组成的影响, 以及在不同退火处理条件下各涂层组织的变化.XRD结果表明, 通过改变沉积工艺参数可以控制沉积态涂层的成分, 使涂层经退火后生成Ti_2AIN相适当成分的沉积态涂层退火生成Ti_2AIN相所需的最低退火温度为650 ℃, 其它沉积态涂层在700℃或更高温度下退火才能生成Ti_2AIN相;退火过程中可能发生的化学反应为:AlTi_3N+5Al->TiN+2Al_3Ti和AlTi_3N+3Al→ Ti_2AIN+Al_3Ti.此外, 延长退火时间可使相同工艺下的沉积涂层生成的Ti_2AlN相含量略有增加利用SEM对涂层进行了分析, 测量了涂层的哗擦系数 |
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其他语种文摘
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Ti-Al-N coatings with different Ti, Al and N contents were deposited on lCrl8Ni9Ti stainless steel substrate by vacuum cathode arc ion plating (AIP) method and the as-deposited coatings were annealed under different conditions. The compositions and phases in the as-deposited coatings were also analyzed and compared. The XRD results showed that the composition of the coatings could be controlled by changing the deposition parameters and distinct Ti_2AlN phase existed in the annealed coatings. The Ti_2AlN phase could not appear unless the annealing temperature reached 650 ℃. The reactions during the annealing process can be described as AlTi_3N+5A→TiN+2Al_3Ti and AlTi_3N+3Al-Ti_2AlN+Al_3Ti. The content of Ti2A1N phase increased slightly by extending the annealing time. The surface morphology and composition of the annealed coating were analyzed by SEM and the friction coefficient of the coating was measured |
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来源
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金属学报
,2010,46(6):743-747 【核心库】
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DOI
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10.3724/sp.j.1037.2010.00743
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关键词
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电弧离子镀
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Ti_2AlN涂层
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高温退火
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摩擦系数
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地址
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中国科学院金属研究所, 金属腐蚀与防护国家重点实验室, 沈阳, 110016
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0412-1961 |
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学科
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金属学与金属工艺 |
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文献收藏号
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CSCD:3908084
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