沉积温度及膜厚对离子镀银膜结构及摩擦学性能的影响
Effects of Substrate Temperature and Film Thickness on Structure and Tribological Properties of Ag Films Prepared by Ion Plating
查看参考文献16篇
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文摘
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采用离子镀在不锈钢和45钢基体表面低温沉积银薄膜。利用X射线衍射仪（XRD）、扫描电镜（SEM）和真空摩擦试验机对低温沉积银膜的晶体结构、表面形貌和摩擦学性能进行了研究。结果表明：银膜的择优取向度随着沉积时间的延长和基体温度的降低具有明显变化；在-147℃沉积6min条件下制备的银膜为表层具有（200）择优取向及底层为（111）择优取向的双层结构；银膜在载荷较高时也有较好的摩擦学性能。 |
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其他语种文摘
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Ag films with various thicknesses were deposited on 45 steel and stainless steel substrates at low temperatures.The crystal structure,morphology and tribological properties of Ag films deposited at low temperature were analyzed by X-ray diffraction (XRD),scanning electron microscopy (SEM) and ball-on-disk vacuum tribometer,respectively.The preferred orientation degree of Ag films show significant change with prologing deposittion time and decreasing substrate temperature.The upper layer of Ag films deposited at—147℃for 6 minutes shows (200) preferred orientation,while the sub-layer showed (111) preferred orientation.Ag films deposited at low temperature showed better anti-wear ability at higher load. |
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来源
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机械工程材料
,2007,31(7):11-14 【核心库】
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关键词
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银膜
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膜厚
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基体温度
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结构
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摩擦磨损
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地址
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中国科学院兰州化学物理研究所, 固体润滑国家重点实验室, 甘肃, 兰州, 730000
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1000-3738 |
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学科
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金属学与金属工艺 |
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基金
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国家自然科学基金
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文献收藏号
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CSCD:2955128
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