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文摘
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采用单步光刻和湿法腐蚀工艺,低成本快速制作面向高性能蓝光和红光DVD光学头物镜的衍射微透镜.所制微光学结构的表面粗糙度在纳米量级,衍射相位台阶的高度在亚微米量级并可以根据需求灵活调整,通光孔径在毫米至厘米量级的范围内可调.组成衍射微透镜的大量基本相位结构,可以根据入射和出射光束的形貌特征及参数指标,通过衍射积分算法灵活设置和排布.远场光学测试显示了所制衍射微透镜的高衍射效能. |
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其他语种文摘
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We discuss a low cost fabrication method of a diffractive microlens with high performance for both blue and red DVD objective lenses,which consists of single-step photolithography and a wet etching process.The surface roughness of the fabricated micro-optics structure is in the nanometer range;The feature height of the diffractive phase step is in the sub-micrometer range;And can be adjusted according to requirements;And the optical aperture of the microlens can be changed from millimeter to centimeter magnitude.A large number of basic phase structures in the diffractive microlens can be set and arranged by a diffractive integrating algorithm according to the appearance and feature parameters of the beam process.Far field optical measurement shows a high diffractive efficiency of the fabricated diffractive structure. |
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来源
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半导体学报
,2007,28(10):1625-1629 【核心库】
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关键词
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高性能衍射微透镜
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衍射积分算法
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单步光刻
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湿法腐蚀工艺
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DVD物镜
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地址
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1.
华中科技大学, 多谱信息处理技术国防科技重点实验室, 武汉, 430074
2.
中国科学院半导体研究所, 北京, 100083
3.
武汉光电国家实验室, 武汉光电国家实验室, 武汉, 430074
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0253-4177 |
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学科
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物理学 |
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基金
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湖北省自然科学基金
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导弹控制系统仿真国防科技重点实验室基金
;
航天科技创新基金
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文献收藏号
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CSCD:2937331
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