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不同形状微管道中的气体流动
GAS FLOWS THROUGH MICRO-PIPES WITH DIFFERENT CROSS-SECTION SHAPES

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文摘 不同形状微尺度管道(圆形、六边形、半圆形、不同宽高比的矩形)中的气体流动特性是微机电系统设计最为关心的问题之一.文中利用信息保存(IP)方法和直接模拟Monte Carlo(DSMC)方法进行研究,给出两种方法的计算结果相互符合,并与其它研究者的BGK模型方程计算结果进行了比较.对于微尺度管道中关心的低Mach数流动,IP方法的统计收敛效率明显优于DSMC方法,通过拟合IP和DSMC结果,给出了圆形、六边形、半圆形、不同宽高比的矩形截面情况下无量纲质量流率与等效Knudsen数的关系.
其他语种文摘 The information preservation (IP) method and the direct simulation Monte Carlo (DSMC) method are employed to investigate gas flows through micro-pipes with the circular, semi-circular, hexagonal or rectan- gular cross sections, respectively, as an important issue in the design and optimization of MEMS devices. The IP and DSMC results agree well with each other, and are compared with the numerical solutions of the BGK model equation given by other researchers. For low Mach number cases in micro-pipe flows, the IP method demonstrates the statistically convergent efficiency superior to DSMC. The investigation shows that the cross-section shapes of micro-pipes considerately affect their mass flow rates. A relation between the mass flow rate and the equivalent Knudsen number for circular, semi-circular, hexagonal and rectangular cross sections is suggested through fitting the IP and DSMC results.
来源 力学学报 ,2007,39(2):145-152 【核心库】
关键词 微管道 ; 稀薄气体效应 ; IP方法 ; DSMC方法
地址

中国科学院力学研究所, 高温气体动力学重点实验室, 北京, 100080

语种 中文
文献类型 研究性论文
ISSN 0459-1879
学科 航空
基金 国家自然科学基金资助项目
文献收藏号 CSCD:2760112

参考文献 共 24 共2页

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引证文献 2

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