|
|
低能氦离子注入引入的量子阱混杂带隙波长蓝移
Low Energy Helium Ion Implantation Induced Quantum-Well Intermixing
查看参考文献9篇
|
文摘
|
提出了采用低能氦离子注入多量子阱（MQW）材料和合适的快速退火条件，实现了MQW带隙波长的蓝移．用这种材料制作了FP腔激光器，与未注入器件相比，实现了37nm的激射波长蓝移． |
|
其他语种文摘
|
Low energy helium ion implantation into InP heterostructures that induces controlled quantum well intermixing is reported and used for the first time. A significant blue-shift enhanced by a moderate RTA process is achieved. An intermixed FP laser is fabricated. Compared to the unimplanted laser,the lasing wavelength of the intermixed laser blue-shifts by 37nm. |
|
来源
|
半导体学报
,2007,28(1):47-51 【核心库】
|
|
关键词
|
He^＋离子注入
;
低能量
;
量子阱混杂
;
蓝移
;
FP腔激光器
|
|
地址
|
中国科学院半导体研究所, 北京, 100083
|
|
语种
|
中文 |
|
文献类型
|
研究性论文 |
|
ISSN
|
0253-4177 |
|
学科
|
电子技术、通信技术 |
|
基金
|
国家自然科学基金资助项目
|
|
文献收藏号
|
CSCD:2741728
|
参考文献 共
9
共1页
|
|
1.
Qiu W. Selective-area MOCVD growth for distributed feedback lasers integrated with vertically tapered self-aligned waveguide.
J Cryst Growth,2003,250:583
|
被引
1
次
|
|
|
|
|
2.
Si S K. Area selectivity of InGaAsP-InP multiquantum-well intermixing by impurity free vacancy diffusion.
IEEE J Sel Topics Quantum Electron,1998,4:619
|
被引
2
次
|
|
|
|
|
3.
Mclean C J. Quantum well intermixing with high spatial selectivity using a pulse laser technique.
Electron Lett,1995,31:1284
|
被引
3
次
|
|
|
|
|
4.
Xia W. Ion mixing ofⅢ-Ⅴcompound semiconductor layered structures.
J Appl Phys,1992,71:2602
|
被引
6
次
|
|
|
|
|
5.
Haysom J E. Quantum intermixing caused by nonstoichiometric InP.
IPRM,2000:56
|
被引
2
次
|
|
|
|
|
6.
Aimez V. Low-energy ion-implantation-induced quantum-well intermixing.
IEEE J Sel Topics Quantum Electron,2002,8:870
|
被引
8
次
|
|
|
|
|
7.
Skogen E J. Tunable sampled-grating DBR lasers using quantum-well intermixing.
IEEE Photonics Technol Lett,2002,14:1243
|
被引
5
次
|
|
|
|
|
8.
Liu Q Z. Planar semiconductor lasers using the photo elastic effect.
J Appl Phys,1998,83(12):7442
|
被引
5
次
|
|
|
|
|
9.
Yin T. The effects of InP grown by He+-plasma assisted epitaxy on quantum-well intermixing.
IEEE J Quantum Electron,2001,37(3):426
|
被引
2
次
|
|
|
|
|
|
了解气象卫星更多信息，请访问