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润滑介质对单晶硅相变与脆塑行为的影响
Phase Transformation and Brittle-ductile Behavior of Single Crystal Silicon under Lubrication

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文摘 研究了分别在十五烷、无水乙醇和蒸馏水润滑下单晶硅的摩擦磨损行为及其相变和脆塑行为.结果表明:在十五烷润滑下单晶硅的摩擦系数和磨损体积损失最低,而在蒸馏水润滑下的摩擦系数和磨损体积损失最大;单晶硅在非极性溶剂十五烷润滑下发生明显的Si-Ⅰ→a-Si相变,磨损表面光滑并呈现明显的金属塑性特征;单晶硅在无水乙醇润滑下发生轻度Si-Ⅰ→a-Si相变,磨损表面特征为微弱的塑性变形和微断裂共存;在蒸馏水润滑下,单晶硅发生轻度的Si-Ⅰ→Si-Ⅲ相变,磨损表面变得粗糙并伴有大量微断裂;润滑介质的极性是影响单晶硅磨损表面相变和脆塑行为的主要因素之一.
其他语种文摘 Friction and wear, phase transformation and brittle-ductile behavior of single crystal silicon against Si3N4 under lubrication at low contact stress were studied. Friction and wear tests were performed on a UMT-2MT test rig under linear velocity of 3 mm/s and load of I N under boundary lubrication. Pentadecane, anhydrous ethanol and distilled water were used as lubricants during the tests. Single crystal silicon showed the lowest friction coefficient (0.136) and wear volume under lubrication of pentadecane. The morphologies and phase compositions of the worn surface were analyzed by means of scanning electron microscopy and Raman micro-spectroscopy. It was found that the worn surface of single crystal silicon lubricated by pentadecanc was characterized by ductile regime. Raman micro-spectrum analysis indicated that phase transformation of Si-Ⅰ to a-Si was involved on the worn surface. Under lubrication of anhydrous ethanol, the phase transformation of Si-Ⅰ to a-Si on the worn surface could be identified although a-Si is much less than that under lubrication of pentadecane. Coexistence of brittle and ductile characteristic could be found on the worn surface. A sight transformation of Si-Ⅰ to Si-Ⅲ on the worn surface of single crystal silicon lubricated by distilled water was, detected by Raman micro-spectrum. In addition, the worn surface became rough and a large number of micro-fracture was found. Polarity of the lubricants might be one of the main factors for phase transformation as well as brittle and ductile behavior of single crystal silicon.
来源 摩擦学学报 ,2006,26(2):113-116 【核心库】
关键词 单晶硅 ; 润滑介质 ; 相变 ; 脆塑行为
地址

中国科学院兰州化学物理研究所, 固体润滑国家重点实验室, 甘肃, 兰州, 730000

语种 中文
文献类型 研究性论文
ISSN 1004-0595
学科 机械、仪表工业
基金 国家自然科学基金资助项目
文献收藏号 CSCD:2346840

参考文献 共 6 共1页

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引证文献 2

1 吴东江 脉冲激光弯曲成形技术中硅片表面的形貌分析 中国激光,2007,34(11):1589-1593
被引 10

2 高玉飞 切削液对金刚石线锯切割单晶硅片质量的影响 武汉理工大学学报,2008,30(8):86-88
被引 2

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