化学气相传输法生长ZnO单晶
Growth of ZnO Single Crystal by Chemical Vapor Transport Method
查看参考文献20篇
文摘
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利用化学气相传输法生长了ZnO单晶.通过控制源区和生长端的温度梯度,使用碳辅助增强质量传尊挚应,在无籽晶自发成核的条件下,得到了晶粒尺寸达5mm×8mm的ZnO晶体.利用长有GaN层的蓝宝石号片待为籽晶,得到了直径32mm、厚4mm左右的ZnO单晶体.用光致发光谱和X射线双晶衍射研究了ZnO晶体的性质并对生长的热力学过程和现象进行了分析. |
其他语种文摘
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A ZnO single crystal is grown by a chemical vapor transport method. The size of the self-nucleated grown ZnO single crystal is 5mm × 8mm through the control of temperature gradient of source and growth zones and the assistance of mass transport enhancement effect of carbon in the growth process, By using a GaN buffered sapphire substrate,a ZnO single crystal of 32mm diameter,4mm thick is obtained. PL spectroscopy and X-ray diffraction technique are used to characterize the properties and the quality of the ZnO single crystal. Thermodynamic phenomena of the single crystal growth process are also discussed. |
来源
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半导体学报
,2006,27(2):336-339 【核心库】
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关键词
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氧化锌
;
化学气相传输
;
单晶生长
;
ZnO
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地址
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中国科学院半导体研究所, 北京, 100083
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语种
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中文 |
文献类型
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研究性论文 |
ISSN
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0253-4177 |
学科
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电子技术、通信技术 |
文献收藏号
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CSCD:2317920
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20
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