文摘
|
A new fabricating method is demonstrated to realize two different Bragg gratings in an identical chip using traditional holographic exposure. Polyimide is used to protect one Bragg grating during the first period. The technical process of this method is as simple as that of standard holographic exposure |
其他语种文摘
|
提出了一种采用传统光学全息曝光技术,在同一芯片上制作不同周期的布拉格光栅的新方法.在这个简单实用的方法中,聚酰亚胺用来保护第一次做好的某一周期的光栅.这种新方法制作工艺简单,成本低,且与传统的半导体工艺兼容. |
来源
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半导体学报
,2005,26(7):1287-1290 【核心库】
|
关键词
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holographic grating
;
DFB laser
;
multi-wavelength
;
CWDM
|
地址
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Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083
|
语种
|
英文 |
文献类型
|
研究性论文 |
ISSN
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0253-4177 |
学科
|
电子技术、通信技术 |
基金
|
国家973计划
;
国家自然科学基金
;
国家863计划
|
文献收藏号
|
CSCD:2091961
|
|
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