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文摘
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采用绝缘体上Si(SOI)材料制作了马赫-曾德干涉型(MZI)SOI热光可变光学衰减器(VOA),利用隔热槽有效降低器件的功率消耗,提高响应速度.在1 510～1 610 nm波长范围内动态调节范围可达到0～29 dB.与未加隔热槽的相同结构光学衰减器相比,器件插入损耗和调制深度不受影响.最大衰减(29 dB)时功率消耗由360 mW降低为130 mW,器件响应速度提高1倍,响应时间由大于100 μs降为小于50 μs. |
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其他语种文摘
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A silicon-on-insulator(SOI)-based thermo-optic variable optical attenuator(VOA) with the type of a Mach-Zehnder interferometer (MZI) and multimode-interference coupler was fabricated. By introducing U-shaped thermal isolation grooves on both sides of the MZI modulating arms to improve heating efficiency, the power consumption at the maximum modulation depth is reduced and the response frequency is doubled. Modulation depth of 29 dB in the wavelength range 1 510 nm to 1 610 nm is achieved. Compared with the variable optical attenuator without thermal isolation grooes.the maximum power consumption de-creases from 360 mW to 130 mW and the response time decreases from about 100 us to iess than 50 ps,while the insertion loss is not affected. |
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来源
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光电子·激光
,2005,16(6):642-645 【核心库】
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关键词
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可变光学衰减器(VOA)
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热光
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隔热槽
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功率消耗
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响应时间
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地址
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中国科学院半导体研究所,光电子研究发展中心, 北京, 100083
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1005-0086 |
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学科
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电子技术、通信技术 |
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基金
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国家863计划
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文献收藏号
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CSCD:2087913
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