用于光网络通信的Si基光子集成器件的研究
Investigation on Si-based Integrated Photonic Devices for Application in Optical Network Communications
查看参考文献7篇
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文摘
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报导了可用于光网络系统终端OADM和OXC的Si基长波长量子阱窄带响应光电接收器，MOEMS和F-P TO宽频域光学滤波器，M—Z型TO光开关和MMI多路分束器以及可变光强衰减器．用应变层SiGe/Si MQW研制的RCE光电接收器响应谱半宽FWHM<6mm，外量子效率η>4．2％；采用表面微机械加工的桥式光学滤波器，当外加电压0→50V，连续可调谐范围达90nm；采用全平面工艺研制的F-P腔TO滤波器，当外加电流0→57mA时，连续可调谐范围达23nm，FWHM<0．5nm．在SOI Si基片上研制的M—ZTO波导光开关，开关时间<30μs，功耗～100mW．开关消光比-13dB和-10dB，1×4MMI多路分束器输出光场的不均衡性<0．36dB，总插入损耗6．9dB．用背向对接的MMI构成的M-Z干涉仪实现了光强的可变调最大衰减量26dB，响应时间100μs，插入损耗4．8～7dB． |
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其他语种文摘
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Several Si based integrated photonic devices, which are indispensable to optical-add-drop-multiplexer (OADM) and optical-cross-connect (OXC) network, are reported, including long wavelength Si-based multiple quantum well (MQW) photodetector with narrow bandwidth response, widely tunable micro-opto-electro-mechanical-systems (MOEMS) and Fabry-Perot (F-P) thermo-optical (TO) optical filter, Mach-Zehnder (M-Z) TO optical switch, multimode interference (MMI) splitter, and variable optical attenuator (VOA). Strained SiGe/Si MQW resonant-cavity-enhanced (RCE) photodetector has a full-width-at-half-maximum (FWHM) of the peak below 6 nm, with external quantum efficiency up to 4.2% . MOEMS tunable filter with four micro-beams, by using surface micromachining technology, has a continuous tuning range of 90 nm under bias of 50 V. F-P TO tunable filter by using planar technology has a continuous tuning range of 23 ran under 57 mA, and its FWHM is smaller than 0.5 nm. M-Z TO waveguide optical switch fabricated on Silicon-on-Insulator (SOI) substrate, exhibits the response speed less than 30 /us, power consumption of about 100 mW, the on and off extinction ratios of -13 dB and -10 dB, respectively. The 1x4 MMI splitter shows a uniformity of 0. 36 dB, and a total insertion loss of 6. 9 dB. The M-Z interferometer using back connected MMI structure can be employed as VOA, with a maximum attenuation of 26 dB, response time of 100 jis and an insertion loss of 4.8~7 dB. |
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来源
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南京大学学报. 自然科学版
,2005,41(1):23-30 【核心库】
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关键词
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Si基集成
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光电探测器
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光学滤波器
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光开关
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光分路器
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光强衰减器
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地址
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中国科学院半导体研究所, 集成光电子学国家重点联合实验室, 北京, 100083
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0469-5097 |
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学科
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电子技术、通信技术 |
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基金
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国家973计划
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国家863计划
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国家973计划
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文献收藏号
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CSCD:2029345
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