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非晶硅碳(a-SiC:H)薄膜光学常数的透射谱表征
Optical Characterization of Hydrogenated Amorphous Silicon Carbide Films from Transmission Spectra

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文摘 报道了一种用透射谱数据分析法计算非晶硅碳薄膜的厚度、折射率、吸收系数和光学带隙等光学常数的方法和程序.这一方法引用有效谐振子模型理论的折射率色散关系,所有公式均为解析表达式,便于进行数据处理,无须专用软件,使用Excel即可完成,适用于多种半导体薄膜材料.将这种方法应用于PECVD方法制备的非晶硅碳(a-SiC∶H)薄膜,对其光学特性进行了分析.
其他语种文摘 Simplified formulae and procedures are presented to compute thickness, refractive index, absorption coefficient, and optical Tauc's gap of a-SiC : H films by the transmission spectrum alone. An appropriate functional dependence of the refrac-tive index on the wavelength,based on the single-effective-oscillator model,is given as a priori information of this reverse optical engineering process. All formulae are in closed form and the computations can be easily carried out on PC computer that is avail-able in laboratories anywhere. The computation procedure has been successfully implemented for amorphous silicon carbide films prepared by PECVD.
来源 半导体学报 ,2005,26(1):34-37 【核心库】
关键词 光学常数 ; 透射谱 ; 非晶硅碳薄膜
地址

中科院半导体所, 表面物理国家重点实验室;;中科院凝聚态物理中心, 北京, 100083

语种 中文
ISSN 0253-4177
学科 电子技术、通信技术
基金 国家973计划
文献收藏号 CSCD:1870490

参考文献 共 10 共1页

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引证文献 5

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2 杨晓红 热处理对WO_3薄膜光学性质的影响 功能材料,2008,39(6):1047-1049
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