Planning and control of 3-D nano-manipulation
查看参考文献18篇
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文摘
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The use of atomic force microscope (AFM) as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks. Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Cartesian space. Traditional nanomanipulation based on AFM is only a 2-D operation and does not consider the bow effect of the piezotube. In this paper, different 3-D nanomanipulation tasks using AFM such as nanolithography, pushing and cutting have been discussed. 3-D path planning is performed directly in the AFM space and the 3-D paths are generated based on the 3-D topography information of the surface represented in the AFM space. This approach can avoid the mappings between the AFM space and Cartesian space in planning. By following the generated motion paths, the tip can either follow the topography of the surface or move across the surface by avoiding collision with bumps. Nanomanipulation using this method can be considered as the "true" 3-D operations since the cantilever tip can be controlled to follow any desired 3-D trajectory within the range of AFM space. The experimental study shows the effectiveness of the planning and control scheme. |
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来源
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Acta Mechanica Sinica
,2004,20(2):117-124 【核心库】
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DOI
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10.1007/bf02484254
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关键词
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AFM
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nano-manipulation
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地址
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1.
Department of Electrical and Computer Engineering, Michigan State University
2.
Shengyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016
3.
Department of Electrical Engineering, Prnceton University
4.
Department of Automation and Computer-Aided Engineering, The Chinese University of Hong Kong
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语种
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英文 |
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文献类型
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研究性论文 |
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ISSN
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0567-7718 |
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学科
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力学 |
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基金
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国家自然科学基金
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文献收藏号
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CSCD:1846991
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