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马赫-曾德干涉型波分复用器的容差分析
Tolerance Analyses of the Mach-Zehnder Interferometric Demutiplexer
查看参考文献7篇
文摘
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通过耦合模理论分析了马赫-曾德干涉(MzI)型波分复用器各结构参数工艺误差对器件串扰的影响,比较了各结构参数的工艺容差性.结果表明,如果串扰要求在-30 dB以下,则波导臂长差的容差性为1%,耦合长度的容差性为2%,波导宽度的容差性较好;容差达到0.6 μm时,串扰仍然在-58 dB;波导间距对工艺精度要求最高,要求误差小于0.03μm. |
其他语种文摘
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:The coupled-mode theory was adopted to analyze the structure parameters' influence on the crosstalk and the tolerance of every structure parameter in the Mach-Zehnder interferometric(MZI) demuti-plexer. The analysis results gave the tolerable error of every parameter with the crosstalk less than -30 dB.The tolerable errors of the difference between the two waveguide arms and the coupler length are 1% and 2% .respectively.The tolerance of the width of the waveguides is good because the crosstalk is less than - 58 dB when the error amounted to 0. 06 ym. On the contrary, the distance between the waveguides required very high precision,the error should be less than 0.03 urn. |
来源
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光电子·激光
,2004,15(6):645-648 【核心库】
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关键词
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马赫-曾德干涉仪(MZI)
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波分复用器
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容差
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串扰
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地址
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中国科学院半导体研究所光电子研究发展中心, 北京, 100083
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语种
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中文 |
文献类型
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研究性论文 |
ISSN
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1005-0086 |
学科
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电子技术、通信技术 |
基金
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国家863计划
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国家自然科学基金资助项目
;
国家973计划
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文献收藏号
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CSCD:1660216
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参考文献 共
7
共1页
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