Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology
采用绝缘体上的半导体技术制备集成的多模干涉型光耦合器和光开关

Yu Jinzhong Wei Hongzhen Yan Qinfeng Xia Jinsong Zhang Xiaofeng

文摘	Integrated multimode interference (MMI) coupler based on silicon-on-insulator(SOI) has been becoming a kind of more and more attractive device in optical systems. SiO2thin cladding layers (＜1.0 μm) can be usedin SOI waveguide due to the large index step be-tween Si and SiO2, making them compatible with VLSI technology. The design and fabrica-tion of MMI optical couplers and optical switches in SOI technology are presented in thepa-per. We demonstrated the switching time of 2 × 2 MMI-MZI thermo-optical switch is less than 20 μs:
其他语种文摘	在光学系统中,SOI(绝缘体上的半导体)上制备集成的MMI(多模干涉)型光耦合器已成为一种愈来愈引人注目的无源器件.由于Si和SiO2之间具有大的折射率差,在SOI波导中可以采用SiO2薄膜(＜1.0μm)作限制层,这与超大规模集成电路工艺相兼容.描述了采用SOI技术制备集成的MMI型光耦合器和光开关的设计和制造结果.业已证实,2×2 MMI-MZI(多模干涉-麦赫-曾德干涉)型热光开关的开关时间小于20μs.
来源	中国科学院研究生院学报 ,2003,20(1):1-6 【核心库】
关键词	SOI ; MMI ; optical coupler ; optical switch ; integrated optics
地址	Institute of Semiconductors, Chinese Academy of Sciences, State Key Laboratory on Optoelectronics, 北京, 100083
语种	英文
文献类型	研究性论文
ISSN	1002-1175
学科	物理学
基金	国家科技部项目 ; 国家自然科学基金
文献收藏号	CSCD:1577788

参考文献共 9 共1页

	1. M A Fardad. Sol-Gel multimode interference power splitters. IEEE photonics Technol Lett,1999,11(6):697-699	被引 8 次
	2. Mohammad R Paiann. Design of phased-array wavelength division multiplexers using multimode interference couplers. Appl Opt,1997,36(21):5097-5108	被引 2 次
	3. Pierre A Besse. Optical bandwidth and Fabrication tolaerance of Multimode Interference Couplers. J of Lightwave Technol,1994,12(6):1004-1009	被引 1 次
	4. R M Jerkins. Novel 1 × N and N × N integrated optical switches using self-imaging multimode GaAs/AlGaAs waveguides. Appl Phys Lett,1994,64(6):684-686	被引 1 次
	5. Lai Q. Arbitrary ratio power splitters using angled silica on silicon multimode interference couplers. Electronics Letters,1996,32(17):1576-1577	被引 7 次
	6. Lucas B Soldano. principle and application. J of Lightwave Technol,1995,13(4):615-627	被引 138 次
	7. David S Levy. A new design for ultracompact multimode interferencebased 2×2 couplers. IEEE Photon Technol Lett,1998,10:96-98	被引 1 次
	8. David S Levy. Length reduction of tapered N× N MMI devices. IEEE Photon Technol Lett,1998,10:830-832	被引 1 次
	9. Treyz G V. Silicon Mach-Zehnder waveguide interferometers operating at 1. Electron Lett,1991,27(2):118	被引 4 次

引证文献 2 篇

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