文摘
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简介了喷墨打印制备薄膜技术的优势与特点,配制了SnO2前驱溶液墨水,并利用该技术在金叉指氧化铝基片上喷镀SnO2前驱溶液墨水,而制得了SnO2气敏薄膜元件。利用XRD分析了SnO2薄膜的晶体结构。通过控制喷打墨水的次数,方便地控制了最终薄膜的厚度。并初步探讨了喷墨打印次数对最终薄膜元件性能的影响。当薄膜只喷打一次时,具有极高的电阻值,而且灵敏度比较低。而随着喷打次数的增加,即薄膜厚度的提高,薄膜电阻也随之降低,并对乙醇具有较好的气敏性能 |
其他语种文摘
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Predominance and principle of ink-jet printing thin films technique are reviewed.By this technique,SnO-2 gas-sensing thin films were prepared expediently.SnO-2 inks were prepared firstly,and thenprinted onto aluminal substrate with interdigital gold electrodes.The thickness of the films was controlled by selecting different printing times.The structure of the films was investigated by XRD.The influence of printing times of SnO-2 gas sensing characteristics was discussed.When printed only once,the films gained the highest resistance and lowest sensitivity.With increasing printing times,the sensitivity of SnO-2 film increased and the resistance decreased |
来源
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传感器技术
,2003,22(1):5-8 【核心库】
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关键词
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喷墨打印
;
制备
;
SnO2薄膜
;
气敏特性
;
二氧化锡
;
气敏薄膜
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地址
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1.
东北大学理学院, 辽宁, 沈阳, 110004
2.
中国科学院金属研究所, 辽宁, 沈阳, 110016
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语种
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中文 |
文献类型
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研究性论文 |
ISSN
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1000-9787 |
学科
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自动化技术、计算机技术 |
基金
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国家973计划
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文献收藏号
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CSCD:1355070
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