镜面起伏对1.55 μm Si基MEMS光滤波器的影响
The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

左玉华 ¹ 毛容伟 ¹ 黄昌俊 ¹ 蔡晓 ¹ 李传波 ¹ 成步文 ¹ 罗丽萍 ¹ 高俊华 ¹ 白云霞 ¹ 姜磊 ¹ 马朝华 ² 王良臣 ¹ 余金中 ¹ 王启明 ¹

文摘	用传输矩阵方法，在简化的光学模型基础上，分别讨论了分布式Bragg反射镜DBR（Distributed Bragg Reflector）的生长精度及镜面起伏对1.55 μm Si基MEMS（Micro-Electro-Mechanical-System）可调谐光滤波器透射谱的影响。计算表明：DBR生长误差仅使主透射峰位置发生变化，而镜面起伏是导致主透射峰性能劣化的主要原因，它使得FWHM增大，透射峰强度下降。理论计算结果能较好地解释实验现像。在此基础上，进一步讨论了引起镜面起伏的多种原因，并提出了可能的解决方法。
其他语种文摘	The prototype 1.55 μm Si-based MEMS tunable optical filter was fabricated, using surface micromachined technology. Based on the Gaussian model of the filter cavity, the effect of the deviation in the mirror fabrication and the cavity length on the static optical property of the filter has been investigated, using transfer matrix method. It is found that the deviation of the mirror thickness affect the position of the transmittance peak, and has no effect on its FWHM and intensity; by contrast, the cavity length undulation has great influence on the quality of the main transmittance peak, widening its FWHM and decreasing its intensity. The model can explain the experimental transmittance curve quite well. The possible problems in the fabrication process have been discussed and potential way to relieve the mirror undulation offered.
来源	光子学报 ,2003,32(6):661-664 【核心库】
关键词	可调谐光滤波器 ; Fabry-Perot ; 镜面起伏
地址	1. 中国科学院半导体研究所, 集成光电子国家重点实验室, 北京, 100083 2. 中科院半导体所, 集成光电子国家重点实验室, 北京, 100083
语种	中文
文献类型	研究性论文
ISSN	1004-4213
学科	电子技术、通信技术
基金	国家973计划 ; 国家自然科学基金 ; 国家863计划
文献收藏号	CSCD:1037467

参考文献共 4 共1页

	1. Tran A T T D. Surface micromachined Fabry-Perot tunable filter. IEEE Photonics Technology Letters,1996,8(3):393-395	被引 7 次
	2. Sugihwo F. Micromachined widely tunable vertical cavity laser diodes. Journal of Micro-Electro-Mechanical Systems,1998,7(1):48-55	被引 3 次
	3. Tayebati P. Microelectromechanical tunable filter with stable half symmetric cavity. Electronics Letters,1998,20(34):1967-1968	被引 1 次
	4. Born M. Principles of Optics,1991	被引 5 次

引证文献 8 篇

1 Zuo Yuhua 1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity 半导体学报,2003,24(9):911-915
被引 2 次

2 曹钟慧可调光衰减器的光衰减量线性补偿光子学报,2004,33(7):826-829
被引 3 次

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镜面起伏对1.55 μm Si基MEMS光滤波器的影响 The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

镜面起伏对1.55 μm Si基MEMS光滤波器的影响
The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter