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纳米硬度技术的发展和应用
Developments and applications of nano-hardness techniques

查看参考文献39篇

文摘 近二十年来,主要用于检测材料表面微米和亚微米尺度力学性质的纳米硬度技术发展迅速。首先,概述硬度的定义、分类及其适用范围。然后,系统地总结纳米硬度技术的发展,重要介绍纳米压痕硬度的测量原理及其影响因素,连续刚度测量原理,高分辨率的载荷位移测量原理,几种常用压头的几何形状,试样表面的准备和确定,相关的测量方法,仪器校准和显微观察等问题。通过压痕实验可获得硬度、弹性模量、断裂韧性、存储模量和损耗模量、蠕变应力指数等。最后,简要介绍纳米划痕硬度测量技术的发展和应用。
其他语种文摘 Great strides have been made over the past two decades in the development of techniques for studying the mechanical properties of materials on the micron and submicron levels. In this review paper, first, several definitions, classifications and their scopes used for hardness are introduced. Secondly, developments for nanoindentation techniques are summarized, especially the measuring principles of nanoindentation, CSM (Continuous Stiffness Measurement), high resolution load/displacement sensors, several typical tips, sample preparation, reference to the point of contact, experimental methods, instrument calibration and so on. With nanoindentation systems, quantitative data can be obtained: hardness, elastic modulus, fracture toughness, storage and loss modulus, stress exponent. Finally, advances in nanoscratch techniques are briefly discussed.
来源 力学进展 ,2002,32(3):349-364 【核心库】
关键词 纳米压痕 ; 纳米划痕 ; 微力学性能 ; 硬度 ; 模量 ; 断裂韧性 ; 蠕变应力指数
地址

中国科学院力学研究所, 非线性力学国家重点实验室, 北京, 100080

语种 中文
文献类型 研究性论文
ISSN 1000-0992
学科 力学
基金 国家自然科学基金 ;  国家自然科学基金 ;  中国科学院知识创新工程项目 ;  中国科学院知识创新工程项目
文献收藏号 CSCD:1013462

参考文献 共 39 共2页

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引证文献 79

1 张泰华 MEMS材料力学性能的测试技术 力学进展,2002,32(4):545-562
被引 27

2 张泰华 纳米硬度技术在表面工程力学性能检测中的应用 中国机械工程,2002,13(24):2148-2151
被引 6

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