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硅基二氧化硅波导的应力和偏振相关性的数值分析
Stress Analysis of Silica Optical Waveguide on Silicon by a Finite Element Method
查看参考文献11篇
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文摘
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使用有限元方法分析了硅基二氧化硅光波导的应力分布，结果表明波导主要受横向压应力影响，而且应力主要集中在芯区和包层的界面附近。根据波导的应力分布，得出波导的折射率分布，并使用ADI全矢量方法示解出波导的模式折射率。比较考虑应力和未考虑应力的波导模式折射率可以得出：波导的双折射效应主要是由于波导应力引起的，阵列波导光栅的偏振相关与中心波长的漂移是受阵列波导的应力分布的影响。 |
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其他语种文摘
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Stress distribution in silicon-based silica optical waveguide is calculated by using a finite element method. The waveguide is mainly subjected to compress stress along lateral direction, and the stress is accumulated near the interface between the core and the cladding layers. With the stress distribution, the mode index is calculated by the finite-difference solution for the full-vector waveguide equation based upon the alternating-direction-implicit (ADI) iterative method. The birefringence of the waveguide is mainly the stress-induced birefringence, and the mode index is larger than that without considering the stress effect. |
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来源
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半导体学报
,2002,23(11):1196-1200 【核心库】
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关键词
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有限元
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应力
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硅基二氧化硅波导
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双折射效应
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地址
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中科院半导体所, 光电子研究发展中心, 北京, 100083
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0253-4177 |
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学科
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电子技术、通信技术 |
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基金
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国家自然科学基金
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国家973计划
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文献收藏号
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CSCD:1007486
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参考文献 共
11
共1页
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