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Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time

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Zhu Qinghua 1 *   Li Bin 1   Hou Yan 1   Li Hongpeng 1   Wu Naiqi 2  
文摘 As wafer circuit width shrinks down to less than ten nanometers in recent years, stringent quality control in the wafer manufacturing process is increasingly important. Thanks to the coupling of neighboring cluster tools and coordination of multiple robots in a multi-cluster tool, wafer production scheduling becomes rather complicated. After a wafer is processed, due to high-temperature chemical reactions in a chamber, the robot should be controlled to take it out of the processing chamber at the right time. In order to ensure the uniformity of integrated circuits on wafers, it is highly desirable to make the differences in wafer post-processing time among the individual tools in a multicluster tool as small as possible. To achieve this goal, for the first time, this work aims to find an optimal schedule for a dual-arm multi-cluster tool to regulate the wafer post-processing time. To do so, we propose polynomial-time algorithms to find an optimal schedule, which can achieve the highest throughput, and minimize the total post-processing time of the processing steps. We propose a linear program model and another algorithm to balance the differences in the post-processing time between any pair of adjacent cluster tools. Two industrial examples are given to illustrate the application and effectiveness of the proposed method.
来源 IEEE/CAA Journal of Automatica Sinica ,2023,10(8):1730-1742 【核心库】
DOI 10.1109/JAS.2023.123189
关键词 Cluster tool ; optimization ; scheduling
地址

1. School of Computer Science and Technology, Guangdong University of Technology, Guangzhou, 510006  

2. Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, 999078

语种 英文
文献类型 研究性论文
ISSN 2329-9266
学科 电子技术、通信技术
基金 国家自然科学基金 ;  广东省自然科学基金 ;  the Science and Technology development fund (FDCT) ;  Macau SAR ;  Research Fund of Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology
文献收藏号 CSCD:7518246

参考文献 共 44 共3页

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