基于可控LC串联谐振的高重频高精度脉冲充电电源
High Repetition Rate and High Accuracy Capacitor Charging Pulse Power Supply Based on Controllable LC Series Resonance
查看参考文献20篇
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文摘
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针对集成电路光刻用准分子激光光源的高重复频率、高精度和高稳定脉冲充电应用需求,设计了一种基于可控LC串联谐振的脉冲充电电源,采用实时检测电路总能量、短路电感中断谐振过程和储能电容精准泄放的技术方案,实现了输出的高重频、高精度以及每脉冲充电电压精确可调。对该充电电源的工作过程进行了理论分析,研究了系统的要点和难点,完成样机并与高重频准分子激光系统联机运行。在激光器初级储能电容5.44 μF的条件下,实现了最大充电电压1.92 kV、充电重复频率4 kHz、充电电压精度<0.05%的输出特性,系统的能量传输率达到40 kJ/s,各项指标均满足集成电路光刻用准分子激光光源的实际应用需求。 |
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其他语种文摘
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A power supply of high repetition rate and high accuracy pulse based on controllable LC series resonance was introduced for the semiconductor lithography Excimer laser application. The key points and working processes of the system and were given in detail, including real-time circuit energy detection, short circuit charging inductor to interrupt resonant, charging capacitor bleeding method to control the accuracy. Then a prototype was produced and worked with the high repetition rate Excimer Laser together. On the condition of energy storage capacitor 5.44 μF, the pulser gets the performances of maximum voltage 1.92 kV, repetition rate 4 kHz, accuracy of the output voltage <0.05%, and the energy transfer rate 4 kJ/s. The system works stably and reliably, and was suited to the high repetition rate Excimer lithography system. |
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来源
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高电压技术
,2018,44(9):3022-3027 【核心库】
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DOI
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10.13336/j.1003-6520.hve.20180828033
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关键词
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脉冲电源
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串联谐振
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准分子激光
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高重频
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高精度
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地址
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1.
中国科学院安徽光学精密机械研究所, 合肥, 230031
2.
中国科学技术大学, 合肥, 230029
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1003-6520 |
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学科
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电子技术、通信技术 |
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基金
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国家自然科学基金
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国家重大科技专项
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文献收藏号
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CSCD:6330070
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