NdFeB 表面磁控溅射沉积Al- Mn 薄膜的耐蚀性
Corrosion resistance of Al-Mn film on NdFeB magnets by magnetron sputtering
查看参考文献20篇
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文摘
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在钕铁硼 (NdFeB)磁体表面利用磁控溅射沉积不同锰含量的铝锰合金薄膜。磁控溅射制备的铝锰合金薄膜表面光滑致密。薄膜结构受到锰含量的影响,当薄膜锰含量从6. 80at%上升到25. 78at%时,薄膜结构由晶态逐渐转变为非晶态,达到35. 67at%时,薄膜中析出金属间化合物Al8Mn5。铝锰合金薄膜的耐腐蚀性能受薄膜成分变化的影响很大,当薄膜中锰含量达到25. 78%时,此时薄膜呈非晶态结构,薄膜的自腐蚀电流密度达到1. 198 × 10~(-7) A/cm~2,比钕铁硼基体降低了2个数量级,耐腐蚀性能最好。 |
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其他语种文摘
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Al-Mn film of different manganese content was deposited on NdFeB magnets by means of magnetron sputtering. The results show that the surface of the Al-Mn film is compact and smooth,and its structure is influenced by the manganese content,when the manganese content in the film increases from 6. 8at% to 25. 78at%,the film structure gradually changes from crystalline to amorphous. When the Mn content reaches 35. 67at%,the intermetallic compound Al8Mn5 is separated out from the film. Corrosion resistance of the Al-Mn film is greatly affected by component of the film,when the manganese content in the film reaches 25. 78at%,the structure of the film becomes amorphous,and its corrosion current density reaches 1. 198 × 10~(-7) A/cm~2 which is lower two orders of magnitude than that of the NdFeB magnets matrix,and its corrosion resistance is preferable. |
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来源
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金属热处理
,2017,42(8):15-19 【核心库】
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DOI
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10.13251/j.issn.0254-6051.2017.08.004
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关键词
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磁控溅射
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钕铁硼磁体
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铝锰合金薄膜
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耐蚀性
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地址
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1.
中国科学院力学研究所, 北京, 100000
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华北理工大学机械工程学院, 河北, 唐山, 063009
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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0254-6051 |
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学科
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金属学与金属工艺 |
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文献收藏号
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CSCD:6054900
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