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液相沉积法制备(004)取向的TiO_2薄膜
Preparation of TiO_2 Thin Film with (004) Orientation via Liquid Phase Deposition

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张欣   徐海燕 *   陈博  
文摘 采用液相沉积法(LPD)制备二氧化钛薄膜,探索pH值对二氧化钛薄膜样品成份、结构和性能的影响,利用XRD、FESEM、UV等方法对薄膜的结构、形貌以及光学特性进行表征。结果表明LPD制备的二氧化钛薄膜为锐钛矿相,可见光透过率高达80%,具有明显的(004)取向;薄膜的结构和光学特性依赖沉积液pH值,pH= 2.03时所制备的薄膜取向性最佳,柱状晶粒排列整齐。
其他语种文摘 The TiO_2 films were fabricated by the liquid phase deposition (LPD) method at different pH values. The effect of pH value on the titanium dioxide film sample composition,structure and properties was explored. T he compositional,structural studies and optical properties of TiO_2 thin film were performed by X-ray diffraction (XRD),field emission scanning electron microscopy (FESEM) and ultraviolet-visible spectroscopy (UV),respectively. The results indicate that the prepared anatase TiO_2 films obviously orient in (004) direction and the thin films show high transmittance of about 80% in visible range. The TiO_2 film of structure and optical properties strongly depend on the pH value were confirmed. The as-prepared TiO_2 films are consisted of the aligned columnar crystallites and shows good orientation in c-axis when the pH value is 2.03.
来源 人工晶体学报 ,2016,45(5):1416-1420 【核心库】
关键词 液相沉积 ; pH值 ; (004)取向 ; TiO_2薄膜
地址

安徽建筑大学, 安徽省先进建筑材料重点实验室, 合肥, 230061

语种 中文
文献类型 研究性论文
ISSN 1000-985X
学科 物理学
基金 高校优秀青年人才支持计划重点项目 ;  安徽省教育厅自然科学基金
文献收藏号 CSCD:5772286

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