0.73 J脉冲能量KrF准分子激光器的特性
Characteristics of KrF excimer laser with an output energy of 0.73 J
查看参考文献15篇
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文摘
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研制了一台KrF大能量准分子激光器,激光器采用紧凑型Chang电极与紫外火花预电离的结合, 实现了激活区大面积的均匀辉光放电,利用LC反转倍压以及一级磁脉冲压缩技术在放电电容上实现了峰值电压40 kV、脉冲上升时间约为100 ns的高压快脉冲激励。研究了工作气体含量对激光器能量输出的影响,在总气压3.3×10~5 Pa,F_2/He, Kr, Ne体积分数比值为1.97∶3.18∶94.85,充电电压27 kV时,得到了738 mJ的单脉冲能量输出,激光近场光斑30 mm×14 mm,在充电电压23 kV时,全电效率最高,达到2.0%。 |
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其他语种文摘
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The KrF excimer laser was studied here. The large area uniform glow discharge was realized by using compact Chang electrode combined ultraviolet spark pre-ionization, and to provide high-voltage discharge with high rising edge, the laser described here used LC inversion and one-stage magnetic switch in excitation circuit. The influence of the laser pulse energy by the work gas content was studied, and in volume ratio of F_2/He∶Kr∶Ne = 1.97∶3.18∶94.85 gas mixture at the total gas pressure of 330 kPa, the cross section of the output beam was 30 mm×14 mm at 27 kV charging voltage. A maximum output energy of 738 mJ was obtained. And the maximal overall efficiency was up to 2.0% with the charging voltage up to 23 kV. |
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来源
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强激光与粒子束
,2013,25(11):3060-3064 【核心库】
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DOI
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10.3788/hplpb20132511.3060
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关键词
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准分子激光器
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激光退火
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大能量
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磁脉冲压缩
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地址
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中国科学院安徽光学精密机械研究所, 合肥, 230031
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1001-4322 |
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学科
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电子技术、通信技术 |
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基金
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国家自然科学基金项目
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文献收藏号
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CSCD:4992943
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