过滤电弧沉积的TiN／TiCrN／CrN／CrTiN多层膜
TiN/TiCrN/CrN/CrTiN multilayer hard coatings deposited by filtered cathode vacuum arc
查看参考文献15篇
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文摘
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用过滤电弧技术在高速钢表面沉积了TiN／TiCrN／CrN／CrTiN多层膜，用扫描电镜(SEM)观察了截面和断口形貌及划痕后的形貌。使用俄歇电子谱仪进行剥层成分分析，用纳米压痕仪测试了多层膜和单层膜的显微硬度和弹性模量。结果表明，在调制周期大于l00nm时，多层膜的显微硬度符合Ha11—Petch关系，在80nm时，则脱离线性关系。划痕法测试多层膜的结合力达到80N。 |
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其他语种文摘
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TiN/TiCrN/CrN/CrTiN multilayer hard coatings were deposited on high speed steel substrates using a filtered ca-thodic vacuum arc technique. Morphology and composition were characterized with scanning electron microscopy (SEM) and auger electron spectroscopy (AES). Nanoindentation tests were performed to determine force-displacement curves which were used to calculate elastic modulus and nanohardness of coatings as a function of modulation period. It was observed that hardness of multilayer coatings was increased with decreasing modulation period. But the values of elastic modulus was less than that of TiN. A deviation from the Hall-Fetch type of strengthening was observed in TiN/TiCrN/CrN/CrTiN multilayer hard coatings at 80 nm of modulation period. The result of coatings adhesion was up to 80 N by scratch tester. |
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来源
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中国有色金属学报
,2003,13(1):167-171 【核心库】
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关键词
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过滤电弧沉积
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显微硬度
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结合力
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多层膜
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地址
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1.
北京科技大学材料科学与工程学院, 北京, 100083
2.
中国科学院力学研究所, 北京, 100080
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语种
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中文 |
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ISSN
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1004-0609 |
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学科
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金属学与金属工艺 |
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文献收藏号
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CSCD:1292363
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