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电弧离子镀Ti(C_xN_(1-x))薄膜的结构和力学性能研究
Structure and Mechanical Properties of Ti(C_xN_(1-x)) Electric Arc Ion Plating
查看参考文献6篇
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文摘
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利用电弧离子镀设备，沉积了不同C、N比的Ti(C_xN_(1-x))薄膜，研究了C含量对Ti(C_xN_(1-x))薄膜的结构（相结构、择优取向及晶格常数）及力学性能（硬度、膜基结合强度及抗磨损性能）的影响。结果表明，复合镀层的C、N比随（CH_4、H_2流量之比而变化，但原子百分数之和基本不变（约46.5%）。复合镀层结构致密，与基体结合良好，抗磨和切削性能优于TiC和TiN镀层。 |
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其他语种文摘
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Ti(C_xN_(1-x)) plating with different ratio of C and N was deposited by using electric are ion plating apparatus. The effect of C content on the structure and mechanical properties of Ti(C_xN_(1-x)) coating was studied. Results showed that antiwear and cutting characteristic of composite coating was more excellent than TiC and TiN coating. |
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来源
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材料保护
,2002,35(12):10-12 【扩展库】
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关键词
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离子镀
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电弧
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Ti(C_xN_(1-x))薄膜
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地址
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1.
中科院金属研究所, 腐蚀与防护国家重点实验室, 辽宁, 沈阳, 110016
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中科院金属研究所表面工程重点实验室, 辽宁, 沈阳, 110016
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语种
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中文 |
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文献类型
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研究性论文 |
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ISSN
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1001-1560 |
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学科
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金属学与金属工艺 |
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文献收藏号
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CSCD:1030085
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参考文献 共
6
共1页
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1.
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2.
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3.
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2
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4.
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5.
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1
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6.
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CSCD被引
1
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